Acculinks
 Home  |  Products  |  Careers  |  About Us  |  Contact Us
Inspection Microscope

Measuring Microscope

Microscope Accessories

Non-Contact Metrology

Wafer Handling and Inspection

Material Testing and Analysis

Compound Biological and Medical Microscope

Parts and Consumables

 


 

  WAFER HANDLING, INSPECTION AND ANALYSIS
 
Acculinks

Mactronix, Automatic Wafer Flat Finder

  • Top and bottom flat finder
  • Automatically align flat up or down.
  • Accommodate many boat combination
Acculinks

Mactronix, Wafer Sorter & Randomizer

  • Wafer sorting and randomizer with two elevators for four cassettes.
  • Available size : 100mm, 125mm, 150mm and 200mm.
Acculinks

Mactronix, Wafer Transfer Station

  • Transfer wafers between two 25 slots cassettes and one 25 slots long boat
  • Available size : 150mm and 200mm
Acculinks

Mactronix, Wafer Packer and Unpacker

  • Table top Wafer Packer and unpacker with touch screen control
  • Insert and remove separator automatically.
  • Detection of presence, absence and multiple separators.
  • Work with conductive and non-conductive separators.
  • Programmable loading capability allows operator to perform other task during operation.
  • Pack or Unpack throughput : More than 250 wafers / hour
Acculinks

Astel, Wafer Auto Loader

  • For 150mm, 200mm or 150mm/200mm, and 300mm wafer handling.
  • From thin to thick wafer in single system. Wafer thickness : 170 to 900um
  • Observation method : Front macro, back macro and micro inspection
  • Touch screen interface recipe management system
  • Back macro handling by Bernoulli effect pad.
  • Cassette moves up and down by conventional indexer with laser mapping
  • Optical edge detection for centering and alignment
  • 525nm green illumination source provide very effective macro inspection.
Acculinks

Astel, UV Irradiator

  • To irradiate dicing frame with UV tape after wafer dicing process
  • Available in semi-automatic or fully automatic version.
  • Semi-automatic model is a microprocessor controlled unit for automated load and unload of a single frame into the chamber, avoid potentially dangerous human handling operation and assuring the best lamp life cycle of more than 2000hrs.
  • Low frequency UV lamp used is not dangerous and does not produce ozone, therefore, not required special protection and exhaust.
    - Fully automatic machine equipped with laser mapping to allow frame in cassettes are pick up perfectly.
Acculinks

New Wave, Laser Cutting/Repair System

  • For IC design, Semiconductor Failure Analysis and LCD repair.
  • For quick removing of passivation, oxide and metal layer, cutting circuit line, removing ITO short.
  • Various wavelengths : 1064nm, 532nm, 355nm, 266nm, etc.
  • Manual or motorize stage.
  • Stage travel : 100mm, 150mm or 200mm.
  • Cut size as small as 1um x 1um.
  • High quality microscope with color display.
  • Air-cooled architecture
Acculinks

Mark II, 200mm Wafer Inspection Microscope Upper Focus Assembly

  • 30 degree trinocular observation tube.
  • 5 objectives changer
  • Wide range of objectives : 5X, 10X, 20X, 40X, 50X, 80X and 100X.
  • Long working distance objective.
  • Upper focusing knob
  • Analyzer and polarizer
  • Camera and LCD display included
  • Optional inker set with defect counter.
Acculinks

Mark II, 200mm Wafer Inspection Microscope Lower Focus Assembly

  • 30 degree trinocular observation tube.
  • 5 objectives changer
  • Wide range of objectives : 5X, 10X, 20X, 40X, 50X, 80X and 100X.
  • Long working distance objective.
  • Upper focusing knob
  • Analyzer and polarizer
  • Camera and LCD display included
  • Optional inker set with defect counter.
Acculinks

Mark II, 150mm Wafer Inspection microscope

  • 150mm wafer inspection
  • Erect image 30 degree trinocular observation tube.
  • Inward facing 5 objectives changer
  • Objective : 5X, 10X, 20X, 50X, 80X.
  • Stage size : 200mm x 200mm
  • Brightfield and Darkfield
  • Co-axial course and fine focusing
  • Ergonomic front focusing knob and intensity control
  • Optional inker set with defect counter.
Acculinks

High Intensity lamps

  • Available for a wide range of high quality intensity lamps and radiation sources for various industry like wafer fabrication, printed circuit board, biological and medical, etc.
  • Application include : UV curing, Microscopy illumination, spectroscopy, photoresist exposure, photochemistry, photolithography, solar simulation, rapid thermal processing, projection printing, metal etching, etc.
Acculinks

Carbon Fiber End Effector for Wafer Handling

  • Available for a wide range of equipment include Applied Material, Canon, EVG, KLA, Nikon, Okamoto, Olympus, SEZ, SVG, TEL, Veeco, Zeiss, etc.
  • Material : Omni-directional or Unidirectional Carbon Fiber.
  • Matrix : Epoxy or phenolic resin
  • ESD safe as carbon is conductive.
  • Special metal or polymide gasket for UV and very high temperature protection.
  • Low particle count on contact surface.
  • Custom-made available.

AccuLinks Systems (M) Sdn Bhd, 2009.
Designed by Alex Wong, 2009